Applied Materials 5200 Centura - 150mm CVD

Applied Materials 5200 Centura - CVD

Vintage: 1997
SN: 9320
Wafersize: 150mm
200mm convertible: Yes
Chambers/configuration: 3
Former BelGaN process: pecvd, peteos
Former BelGaN MES/ERP name: CENT13

Dimensions & weight estimates:
Mainframe dim (cm): 250 x 240 x 245
Mainframe weight (kg):
Bypack1 dim (cm): 52 x 75 x 75
Bypack1 weight (kg):
Bypack2 dim (cm): 52 x 75 x 75
Bypack2 weight (kg):