Mainframes - Axcelis GDS VHE - 150mm Implant
Description
Axcelis GDS VHE - Implant
Current status tool : In fab in shutdown, cleaned and gasses removed, chamber to be decontaminated , to be deinstalled by buyer
Vintage: 2001
SN: VHE57
Wafersize: 150mm
200mm convertible: Yes
Former BelGaN MES/ERP name: MEV1
Current status tool : In fab in shutdown, cleaned and gasses removed, chamber to be decontaminated , to be deinstalled by buyer
Vintage: 2001
SN: VHE57
Wafersize: 150mm
200mm convertible: Yes
Former BelGaN MES/ERP name: MEV1
Documents
Visit day(s)
By appointment
info@openbare-verkopen.be
info@openbare-verkopen.be
Westerring 15
9700 Oudenaarde
Belgium