Mainframes - Tegal Tegal903e - 150mm Plasma Etch

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Lot number
212
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VAT: 21 %

Description

Tegal Tegal903e - Plasma Etch
Current tool status: Deinstalled, foil wrapped and stored in warehouse, ready to to load for packaging
Vintage: 1995+/-3j
SN: 9032
Wafersize: 150mm
Former BelGaN process: spacerpets
Former BelGaN MES/ERP name: TEGAL9031
Dimensions & weight estimates:
Mainframe dim (cm): 193 x 100 x 158
Mainframe weight (kg):

Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


semiconductor BelGaN waferfab fab fab2 mainframe equipment tool

Documents

Visit day(s)

By appointment
info@openbare-verkopen.be

Westerring 15
9700 Oudenaarde
Belgium

Collection day(s)

By appointment
info@openbare-verkopen.be - all lots must be out to the fab by 15th of October.

Westerring 15
9700 Oudenaarde
Belgium