Spare Parts for Plasma Etch LAM CHILLER

Spares can be used for tool lots 51 ,60 ,61 ,62 ,63 ,64 ,65 ,66 ,67 ,81 ,92 ,93 ,126
Number of different Spares : 59
Estimated value of Spares (Eur) : 22319
See also xls sheet for detailed list of spares and quantities per Spare