Spare Parts for Plasma Etch LAM Rainbow 4528I

Spares can be used for tool lots 51 ,61 ,62 ,63 ,64 ,65 ,66 ,67 ,92 ,126
Number of different Spares : 656
Estimated value of Spares (Eur) : 464339
See also xls sheet for detailed list of spares and quantities per Spare