Spare Parts for Plasma Etch LAM Rainbow TCP 9600

Spares can be used for tool lots 39 ,40 ,41 ,42 ,43 ,44 ,45 ,46 ,47 ,48
Number of different Spares : 489
Estimated value of Spares (Eur) : 548025
See also xls sheet for detailed list of spares and quantities per Spare