Description
Tegal Tegal903e - Plasma Etch
Vintage: 1995+/-3j
Wafersize: 150mm
Former BelGaN process: spacerpets
Former BelGaN MES/ERP name: TEGAL9035
Dimensions & weight estimates:
Mainframe dim (cm): 115 x 105 x 140
Mainframe weight (kg):
Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.
semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
Vintage: 1995+/-3j
Wafersize: 150mm
Former BelGaN process: spacerpets
Former BelGaN MES/ERP name: TEGAL9035
Dimensions & weight estimates:
Mainframe dim (cm): 115 x 105 x 140
Mainframe weight (kg):
Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.
semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
Documents
Visit day(s)
By appointment
Visiting days: on appointment between December 2nd and January 8th. belgan.pickup@online-auctions.be
Visiting days: on appointment between December 2nd and January 8th. belgan.pickup@online-auctions.be
Westerring 15
9700 Oudenaarde
Belgium
Collection day(s)
By appointment
Pickup: before end of March. Schedule will be published after completion of the auction and will be dependent on number of tools bought, placement in the fab and timely payment. belgan.pickup@online-auctions.be
Pickup: before end of March. Schedule will be published after completion of the auction and will be dependent on number of tools bought, placement in the fab and timely payment. belgan.pickup@online-auctions.be
Westerring 15
9700 Oudenaarde
Belgium