Description
LAM Rainbow 4528I - Plasma Etch
Wafersize: 200mm
Former BelGaN process: oxidepets
Former BelGaN MES/ERP name: LAM14
Dimensions & weight estimates:
Mainframe dim (cm): 111.8 x 137.2 x 167.5
Mainframe weight (kg): 788
Bypack1 dim (cm): 55.9 x 81.3 x 110.5
Bypack1 weight (kg): 135
Bypack2 dim (cm): 55.9 x 22.9 x 76.2
Bypack2 weight (kg): 120
Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.
semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
Wafersize: 200mm
Former BelGaN process: oxidepets
Former BelGaN MES/ERP name: LAM14
Dimensions & weight estimates:
Mainframe dim (cm): 111.8 x 137.2 x 167.5
Mainframe weight (kg): 788
Bypack1 dim (cm): 55.9 x 81.3 x 110.5
Bypack1 weight (kg): 135
Bypack2 dim (cm): 55.9 x 22.9 x 76.2
Bypack2 weight (kg): 120
Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.
semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
Documents
Visit day(s)
By appointment
Visiting days: on appointment between December 2nd and January 8th. belgan.pickup@online-auctions.be
Visiting days: on appointment between December 2nd and January 8th. belgan.pickup@online-auctions.be
Westerring 15
9700 Oudenaarde
Belgium
Collection day(s)
By appointment
Pickup: before end of March. Schedule will be published after completion of the auction and will be dependent on number of tools bought, placement in the fab and timely payment. belgan.pickup@online-auctions.be
Pickup: before end of March. Schedule will be published after completion of the auction and will be dependent on number of tools bought, placement in the fab and timely payment. belgan.pickup@online-auctions.be
Westerring 15
9700 Oudenaarde
Belgium