Applied Materials Centura DPS - 150mm Plasma Etch C

Applied Materials Centura DPS - Plasma Etch

Vintage: 2001
SN: 321932
Wafersize: 150mm
200mm convertible: Yes
Former BelGaN process: polypets, nitridepets
Former BelGaN MES/ERP name: CENTURA9

Dimensions & weight estimates:
Mainframe dim (cm): 240 x 215 x 245
Mainframe weight (kg):
Bypack1 dim (cm): 95 x 115 x 210
Bypack1 weight (kg):
Bypack2 dim (cm): 61 x 110 x 170
Bypack2 weight (kg):
Bypack3 dim (cm): 40 x 85 x 100
Bypack3 weight (kg):
Bypack4 dim (cm): 40 x 85 x 100
Bypack4 weight (kg):
Bypack5 dim (cm): 55 x 100 x 100
Bypack5 weight (kg):

Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


semiconductor BelGaN waferfab fab fab2 mainframe equipment tool